The Right Tool For Low Energy X-Ray Microanalysis
نویسندگان
چکیده
منابع مشابه
Fundamental Constants for Quantitative X-ray Microanalysis.
Quantitative X-ray microanalysis requires the use of many fundamental constants related to the interaction of the electron beam with the sample. The current state of our knowledge of such constants in the particular areas of electron stopping power, X-ray ionization cross-sections, X-ray fluorescence yield, and the electron backscattering yield, is examined. It is found that, in every case, the...
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X-ray microanalyses of sub-micrometer features require that a lower accelerating voltage be used. This reduction in the accelerating voltage reduces the penetrating distance of the beam electrons and thereby reduces the analytical volume. Two general strategies have been proposed for achieving the smallest analytical volume. The first approach involves significantly reducing the accelerating vo...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2003
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927603444486